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| Octafluorpropane C3F8»
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| OCTAFLUOROPROPANE (C3F8) |
| Name: |
Octafluorpropane |
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| Symbol: |
C3F8 |
| CAS Registry ID: |
76-19-7 |
| UN Number: |
UN 2424 |
Octafluorpropane C3F8 used
for plasma etching of silicon films when higher selectivity required.
Lower grades of C3F8 are also available.
Qualitative performance
OCTAFLUOROPROPANE (C3F8,
R218, Halocarbon 218).
Gas Purity 99,999
|
| Parameter |
Measure in |
Detection limit |
Critical value |
Octafluorpropane
in liquid phase, min.
|
% vol. |
|
99,999 |
| Air* |
vppm |
0,5 |
10 |
| Water |
wppm |
0,01 |
1,0 |
| Acidity as HF |
wppm |
0,01 |
0,1 |
| Non-volatile residue |
wppm |
0,5 |
10 |
Air*-means Nitrogen, Oxygen, Carbon Monoxide
and Carbon Dioxide
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OCTAFLUOROPROPANE (C3F8,
R218, Halocarbon 218).
Gas Purity 99,96.
|
| Octafluoropropane |
C3F8 |
% |
99,96 |
| Moisture |
H2O |
wppm |
10 |
| Nitrogen |
N2 |
vppm |
50 |
| Oxygen |
O2 |
vppm |
20 |
| Carbon dioxide |
CO2 |
vppm |
5 |
| Carbon oxide |
CO |
vppm |
5 |
| Acidity as HF |
|
wppm |
0,1 |
Information about cylinders
| Type of a cylinder |
Bulk, litreses |
Type of a valvees |
Operating pressurees, bar |
Net weightes, kg |
| B40 |
40 |
DIN 477/6 |
22 |
42 |
| B50 |
50 |
DIN 477/6 |
22 |
50 |
Transport data
| Chemical Symbol: |
C3F8 |
| CAS Registry ID: |
76-19-7 |
| Physical properties: |
A colorless, non-toxic, non-flammable gas |
| Hazard Class: |
2.2 |
| UN Number: |
UN 2424 |
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| Xenon, Xe » |
| Krypton, Kr » |
| Neon, Ne » |
| Helium, He » |
| Argon, Ar » |
| Tetrafluoromethane,
CF4 » |
| Octafluorocyclobutane,
C4F8 » |
| Sulfur Hexafluoride,
SF6 » |
| Silicon tetrafluoride,
SiF4 » |
| Propen(Propylen),
C3H6 » |
| Propan, C3H8
» |
| Butan » |
| Lasergases » |
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